Way Measure, Generate, and
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Ways to mesure a displacement (of a solid body):
- beam in bending with strain gage
- optical encoder
- piezzo cristal
- differential transformer
- capacitor
- mechanical lever
- flow rate through an opening
- microscope with length scale
Ways to mesure/apply a force (on a solid body):
- beam in bending with strain gage
- compression/extension of springs
Ways to (accurately) position a measuring device relative to
wafer:
- 3 axis linear stage
- using flexures for axes (small motions!)
Ways to fixture a (brittle) wafer:
- 3-point support
- wiffle tree
- liquid-curing medium (e.g.epoxy)
- toggle clamps